Connector device for removing waste gas of semiconductor equipment

The utility model provides a connector device for removing waste gas of semiconductor equipment. The exhaust pipe connector comprises a connector body and an exhaust pipe, one side of the connector body is arranged to be a cambered surface, a plurality of air suction holes are formed in the cambered...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG JIANSHUN, LIN MAOCHUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a connector device for removing waste gas of semiconductor equipment. The exhaust pipe connector comprises a connector body and an exhaust pipe, one side of the connector body is arranged to be a cambered surface, a plurality of air suction holes are formed in the cambered surface, the air suction holes are located in the connector body and communicated with one another,the exhaust pipe is arranged on the other side face of the connector body, and the exhaust pipe penetrates through the side face of the connector body and is communicated with the air suction holes.When the top cover of the semiconductor device is opened, the connector body is attached to the opening position of the semiconductor device, overflowing harmful gas is sucked in from the air suctionhole and stored or neutralized through the exhaust pipe, environmental pollution or harm to a human body is avoided, and the safety of the connector device is improved. 本实用新型提供一种用于清除半导体设备废气的接头装置,包括接头本体和排气管,接头本体的一侧设置为弧面,弧面设置有多个吸