Automatic generation device for black silicon

The utility model discloses an automatic generation device for black silicon, and belongs to the technical field of black silicon processing equipment. The device comprises a production box, a placingframe and a molecular pump, a reaction frame is fixed in the production box, an injection sheath lay...

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Bibliographische Detailangaben
Hauptverfasser: ZHAO JIANGHUA, ZHU YAOPEI, JIANG JIAN, FANG CHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an automatic generation device for black silicon, and belongs to the technical field of black silicon processing equipment. The device comprises a production box, a placingframe and a molecular pump, a reaction frame is fixed in the production box, an injection sheath layer is placed in the reaction frame, a heater is fixed at the bottom end in the production box, andan air inlet pipe is fixed at one end of the production box; a silicon wafer to be processed can be suspended through the loading frame; a connected tackle slides on the lead screw; the silicon waferis sent into a reaction frame to be processed and generated; the silicon wafer loading and unloading operation is simple; and meanwhile, the production box does not need to be cooled or restarted, energy conservation and emission reduction are achieved, convenience is brought to use of users, waste gas in the exhaust pipe can be compressed through operation of the molecular pump, then the flow speed of the waste gas in the