Single crystal furnace
The utility model discloses a single crystal furnace which comprises a single crystal furnace body and a cooling pipe, wherein the cooling pipe is used for introducing cooling gas into a thermal field in the single crystal furnace body, the cooling pipe penetrates through the single crystal furnace...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a single crystal furnace which comprises a single crystal furnace body and a cooling pipe, wherein the cooling pipe is used for introducing cooling gas into a thermal field in the single crystal furnace body, the cooling pipe penetrates through the single crystal furnace body, one end of the cooling pipe is located outside the single crystal furnace body to serve as the inlet end of the cooling gas, and the other end of the cooling pipe is located in the single crystal furnace body to serve as the outlet end of the cooling gas. According to the single crystal furnace disclosed by the utility model, under the condition that the cooling environment is not changed, cooling gas is introduced into the single crystal furnace by utilizing the cooling pipe to cool a thermal field, so that the purposes of quickly cooling thermal field components and shortening the cooling time of the thermal field of the single crystal furnace are achieved.
本实用新型公开的单晶炉,包括单晶炉体及冷却管;冷却管用于向单晶炉体内热场通入冷却气体,冷却管穿过单晶 |
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