Articles having multi-layer plasma erosion protection

An article having multi-layer plasma erosion protection. The article includes a body including a surface and a plurality of high aspect ratio features in the body, the plurality of high aspect ratio features having an aspect ratio of about 1: 1 to about 300: 1. The article also includes a conformal first anti-plasma layer on the surface and walls of the plurality of high aspect ratio features, thefirst anti-plasma layer having a porosity of about 0% and a thickness of about 100 nanometers to about 1 micron. The article further includes a second plasma resistant layer, the second anti-plasma layer covers the conformal first anti-plasma layer at an area of the surface but does not cover the conformal first anti-plasma layer at the wall of the plurality of high aspect ratio features, the second anti-plasma layer having a porosity of less than 1% and a thickness of about 1-10 microns. 一种具有多层等离子体侵蚀保护的制品。该制品包括主体，所述主体包括表面和所述主体中的多个高深宽比特征，所述多个高深宽比特征具有约1:1至约300:1的深宽比。该制品还包括在所述表面上和所述多个高深宽比特征的壁上的保形的第一抗等离子体层，所述第一抗等离子体层具有大