Silicon wafer texturing device

The utility model provides a silicon wafer texturing device which comprises a frame body, a liquid conveying device and a spraying device, and the frame body is provided with a groove; the infusion device is fixed on the frame body; the spraying device is arranged above the groove, the two ends of t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WAN ZHAOYONG, HUANG DENGQIANG, CUI SHUIWEI, WU ZHANGPING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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