Micro -electro -mechanical transducers

The utility model relates to micro -electro -mechanical transducers. For example, a micro -electro -mechanical transducers includes: the semiconductor body has first surface relative each other and second surface, first structure body, the first surface of coupling to semiconductor body, first sealed chamber is located between semiconductor body and the first structure body, and it is active regional, hold in first sealed chamber, include the sensor elements between two at least slots and the slot. The slot extends towards the vertical direction of second surface along the first surface from the semiconductor body. 本公开涉及微机电换能器。例如，种微机电换能器包括：半导体本体，具有彼此相对的第表面和第二表面；第结构本体，耦合至半导体本体的第表面；第密封腔，位于半导体本体和第结构本体之间；以及活跃区域，容纳在第密封腔中，包括至少两个沟槽以及沟槽之间的传感器元件。沟槽沿着从半导体本体的第表面朝向第二表面的垂直方向延伸。