Pipeline purging device and process gas carry clean system
The utility model discloses a pipeline purging device and process gas carry clean system belongs to pipe cleaning system technical field. The pipeline purging device includes negative pressure vacuummolding group, and this module still includes branch's pipeline of connecting between first mano...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a pipeline purging device and process gas carry clean system belongs to pipe cleaning system technical field. The pipeline purging device includes negative pressure vacuummolding group, and this module still includes branch's pipeline of connecting between first manometer and first diaphragm valve including the first check valve, first manometer and the first diaphragmvalve that connect gradually, and the bleeder is provided with second diaphragm valve on the road, and the vacuum pump is connected to the free end of branch's pipeline. Negative pressure vacuum molding group is used for the vacuum pumping operation to equipment, can be with gaseous whole discharge the in the equipment. The device includes still that the malleation sweeps the module, and this module includes third diaphragm valve, second manometer, buffer tank, fourth diaphragm valve and the second check valve that connects gradually, and nitrogen storage gas can be deposited to the buffer tank, when nitrogen gas has |
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