Capacitive pressure sensor's packaging structure

The utility model discloses a capacitive pressure sensor's packaging structure, including the shell with set up the sensor in the shell, the one end of sensor sets up the output line, the output lineextends to the outside of shell, forms the pressurization chamber between the other end of shell...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG CONGJIANG, ZHA JUN, SONG XIAOJUN, CHEN KUANGHUA, CHEN JINRONG, GAN YINGSHENG, CAO XIAOLIU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a capacitive pressure sensor's packaging structure, including the shell with set up the sensor in the shell, the one end of sensor sets up the output line, the output lineextends to the outside of shell, forms the pressurization chamber between the other end of shell and sensor, the other end of shell sets up first through -hole, still sets up the filling block in theshell, the filling block sets up the second through -hole, first through -hole and second through -hole all are linked together with the chamber of pressurizeing, the filling block sets up the one side of keeping away from the output line in the sensor, the filling block is made by flexible material. At the sensor during operation, the liquid capacity of pressurization intracavity is limited, andthe produced energy of volume expansion is limited to leading to the fact the damage to the sensor when liquid freezes solidification, and simultaneously, the filling block is made by the elasticity material, and the volume of