A adjust door for installing in vacuum coating equipment

The utility model discloses an adjust door for installing in vacuum coating equipment, including framework, executive module and adjust the door, the framework is provided with the air -out chamber oflining up the framework, the executive module is fixed to be set up in the top of framework, the fix...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: ZHAO ZHONGHONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model discloses an adjust door for installing in vacuum coating equipment, including framework, executive module and adjust the door, the framework is provided with the air -out chamber oflining up the framework, the executive module is fixed to be set up in the top of framework, the fixed slide rail that supplies to adjust the door activity that is provided with of the inner wall offramework, the executive module moves to set up and can drive and adjusts the door realizes reciprocating motion in the slide rail with adjusting the couplet on the door, and then adjusts the door andcan cut off or make it the UNICOM with the air -out chamber, outer peripheral face along the fixed installation department that is provided with of circumference at air -out chamber both ends, a plurality of through -holes that are used for the installation are seted up to the installation department, the caulking groove has been seted up for the outer peripheral face of the opposite side of framework along circumference t