Vapor deposition furnace vent gas treatment system in

The utility model provides a vapor deposition furnace vent gas treatment system in, the induction cooker comprises a cooker bod, be equipped with furnace body air inlet and furnace body gas outlet onthe furnace body, the furnace body gas outlet is connected with the first air inlet that filters the jar, first gas outlet of filtering the jar is connected through the air inlet that first vacuum pump and second filtered the jar, the gas outlet of second filtration jar is passed through the second vacuum pump and is connected with third filtration jar, first filtration jar, second filter the jar,the third filters the jar and is the empty can body structure. Can effectively prevent tail gas deposit in the pipeline and on the vacuum pump among this vapor deposition furnace vent gas treatment system in, can effectively prolong the life of equipment, filter simultaneously and jar adopt an empty tank structure, need not to add any chemical reagent, jar body repeatedly usable, the tail gas deposit also can cyclic utili