Piezoelectric stack micropump based on flexible hinge mechanism of amplification of second grade symmetry formula

The utility model discloses a piezoelectric stack micropump based on flexible hinge mechanism of amplification of second grade symmetry formula, including one -way outlet valve, one -way inlet valve,valve gap, pump chamber, cushion chamber way, elastic ball, sealing washer, vibration film, upper flat plate, mechanism of amplification, piezoelectric stack, piezoelectric stack electrode, support and dull and stereotyped down, the utility model discloses the cushion chamber way is processed out to the upper flat plate that will vibrate under the film to say at the cushion chamber and can bear the elastic ball that embeds a plurality of rubber texture bigger pressure when making vibration thin film vibration make the pump chamber compression and further enlarge the volume, possess bigger buffering drive during the increase and do all can, required great driving voltage's burden when reducing the big change of pump chamber body volume, again because little displacement amplification mechanism adopts the flexible t