Substrate delivery device

The utility model provides a substrate delivery device who can the precision carries the base plate to the predetermined position of module higherly. Constitute a device, the device possesses: the base plate keeps portion (25), and it keeps the base plate, in order to carry this base plate from a module to another module along the lateral shifting freedom, the 1st test section (3), it is arrangedin keeping portion (25) to keep the position of (25) to detect this base plate before carrying to another module at this base plate after having received the base plate from a module at the base plate, the 2nd test section (55, 56), it is used for detecting in order will be located actual position that the base plate that has gone on removing for the mode of the tentative position set for to another module handing -over base plate keeps portion (25) and should fix tentatively the dislocation between the position, position decision portion (10), it is arranged in keeping the position of portion(25) and dislocation to d