Low pressure diffusion tongYuan device, PN junction preparation equipment and battery production system

The utility model relates to a photovoltaic cell manufacturing technology provides a low pressure diffusion tongYuan device, PN junction preparation equipment and battery production system, and low pressure diffusion tongYuan device includes: source bottle, intake pipe, outlet duct. The source bottle is used for storing doping source liquid, the first end of intake pipe is connected with the inertia air supply, and the second end stretches into below the liquid level of doping source liquid through the import of source bottle, the first end of outlet duct is connected with low pressure diffusion equipment, and the second end stretches into more than the liquid level of doping source liquid through the export of source bottle, wherein, be provided with admission valve and air outlet valve respectively in outlet duct and the intake pipe, and the admission valve is the same with division off state of air outlet valve. The utility model discloses an off state that opens with the air outletvalve keeps unanimously