Dual power supply system and semiconductor production equipment

The utility model provides a dual power supply system and semiconductor production equipment, dual power supply system includes: a total power supply unit for providing the alternating current, a mainpower supply for inciting somebody to action the alternating current that total power supply unit pr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHI ZHIPING, HONG JILUN, NI MINGMING, WU ZONGYOU, LIN ZONGXIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES SYSTEMS FOR STORING ELECTRIC ENERGY
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