Dual power supply system and semiconductor production equipment
The utility model provides a dual power supply system and semiconductor production equipment, dual power supply system includes: a total power supply unit for providing the alternating current, a mainpower supply for inciting somebody to action the alternating current that total power supply unit pr...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | The utility model provides a dual power supply system and semiconductor production equipment, dual power supply system includes: a total power supply unit for providing the alternating current, a mainpower supply for inciting somebody to action the alternating current that total power supply unit provided is changed the back and is supplied power for the load, a standby application power supply for inciting somebody to action the alternating current that total power supply unit provided is changed the back and is supplied power for the load, an automatic transfer switch, automatic transfer switch include the switch, the switch is connected with total power supply unit, main power supply and reserve power supply for passing through self switch total power supply unit of realization and main power supply electricity and be connected or realize total power supply unit and reserve power supply electricity and be connected . the utility model discloses a dual power supply system can switchwhen main power supply br |
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