Can prepare nano -imprint device of complicated micro -structure

The utility model provides a can prepare nano -imprint device of complicated micro -structure, it emits the substrate at first to unreel the roller, the glue spreader is scribbled the photosensitive resist on the substrate, convey the printing device below with the substrate, the warming mill heats...

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Bibliographische Detailangaben
Hauptverfasser: ZHEMING ZHANG, YAN ZHOU, GONGCHENG ZHENG, JINGPENG LI, DIANZHENG WANG, JIN ZHANG, ZISU XU, BIN FU, YANPING ZHENG, KAITUO FENG, XINYU CANG, DEEN DAI, ZHENGFA YI, QUN ZHANG, YAN GU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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