Extractor electrode and ion implantation device

The utility model relates to a semiconductor device manufacture technical field especially relates to an extractor electrode and ion implantation device. Extractor electrode, including the electrode body, still including set up entry in the electrode body, export and with the passageway of entry, export intercommunication, cooling fluid follows the entry gets into in the passageway with the electrode body carries out the heat exchange, absorbs follow behind the heat of electrode body the export is discharged. The utility model discloses extractor electrode's cooling efficiency has been increased substantially, simultaneously, reduce the down time of ion implantation device, improved the production efficiency of wafer. 本实用新型涉及半导体制造技术领域，尤其涉及种萃取电极及离子注入装置。所述萃取电极，包括电极本体，还包括设置于电极本体中的入口、出口以及与所述入口、出口连通的通道；冷却流体从所述入口进入，在所述通道中与所述电极本体进行热交换，吸收所述电极本体的热量后从所述出口排出。本实用新型大幅度提高了萃取电极的冷却效率；同时，减少了离子注入装置的停机时间，提高了晶圆的生产效率。