Surface topography measurement device
The utility model relates to surface topography measurement technical field, it provides a surface topography measurement device, include: the light source for produce the emergent light of broad band, transmit the collimation unit to, the collimation unit for be beam with the emergent light collima...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model relates to surface topography measurement technical field, it provides a surface topography measurement device, include: the light source for produce the emergent light of broad band, transmit the collimation unit to, the collimation unit for be beam with the emergent light collimation, beam incides the detection unit, the detection unit sets certain angle to with determinand body surface face, and shines determinand body surface face after the photo genesis chromatic dispersion of the detection unit messenger incident and the focus, the light of determinand body surface surface reflection enters into receiving element, and receiving element has great numerical aperture, assembles the light of the object surface reflection that awaits measuring and deflects with the lightpath, light from the receiving element outgoing enters into the focus unit, and the focus unit is with point focusing to the information processing unit, the information processing unit is the signalof telecommunication with |
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