Cavity seal structure's semiconductor processing equipment

The utility model discloses a cavity seal structure's semiconductor processing equipment, its structure includes that transmission band, support panel, support frame, motor case, machining device, numerical control panel, pilot lamp, pole seal the closely packed and put, the transmission band i...

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Bibliographische Detailangaben
1. Verfasser:	WU YANFA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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