Cavity seal structure's semiconductor processing equipment
The utility model discloses a cavity seal structure's semiconductor processing equipment, its structure includes that transmission band, support panel, support frame, motor case, machining device, numerical control panel, pilot lamp, pole seal the closely packed and put, the transmission band i...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a cavity seal structure's semiconductor processing equipment, its structure includes that transmission band, support panel, support frame, motor case, machining device, numerical control panel, pilot lamp, pole seal the closely packed and put, the transmission band is the cuboid structure, is the tangent plane 7 for the rectangle is long 8cm, clearance -fit mode swing joint is adopted with swivel bearing in transmission band left side bottom, the utility model relates to a cavity seal structure's semiconductor processing equipment is equipped with a pole closely packed and puts, and through binding fastening equipment, the transmission box carries out the transmission with the transfer line for pivot and the seal secret nature of the rotatory enhancement of gyrowheel to equipment, the equipment of having solved seals the problem that secret nature is not enough when sealing close product, has avoided the production meeting of coming out infiltration moisture to produce moisture and |
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