Magnetic suspension is touched needle position and is moved sensor

The utility model belongs to the displacement sensor field to magnetic suspension is touched needle position and is moved sensor is specifically disclosed, including touching needle shaft suspension module, touching needle shaft guide die piece, accuracy of measurement module and displacement measurement module, it is used for the suspension support to touch needle shaft to touch needle shaft suspension module to but control survey power, touch the needle shaft guide die piece and include magnetic suspension bearing and gap sensor, be used for guaranteeing to touch needle shaft and put at central point in the measurement process, head and contact pilotage are held including touching needle holder to the accuracy of measurement module, the change of contact pilotage displacement on along with the measured workpiece vertical direction and reciprocating, the displacement measurement module realizes the measurement of object vertical direction displacement through detecting the laser Interferometer stripe. The ut