Manipulator, basement transmission system and litho machine

The utility model provides a manipulator, include: mechanical arm, flexible buffer device, manipulator hand, first positioning end and second positioning end, the flexible buffer device connect in between mechanical arm and the manipulator hand, first positioning end is fixed on the flexible buffer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHENG FENGBIAO, ZHENG JIAOZENG, CHEN HUAIYANG, WANG GANG, JIANG JIE, TAO HONGJIAN, ZHANG KUOFENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHAMBERS PROVIDED WITH MANIPULATION DEVICES CINEMATOGRAPHY ELECTROGRAPHY HAND TOOLS HOLOGRAPHY MANIPULATORS MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
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