Manipulator, basement transmission system and litho machine

The utility model provides a manipulator, include: mechanical arm, flexible buffer device, manipulator hand, first positioning end and second positioning end, the flexible buffer device connect in between mechanical arm and the manipulator hand, first positioning end is fixed on the flexible buffer device, the second positioning end is installed in bit position undetermined, first positioning endis along with manipulator hand -movement, as manipulator hand -movement during to the target location, first positioning end is bit position department undetermined second positioning end institute isspacing. The embodiment of the utility model provides a manipulator, basement transmission system and litho machine, mechanical handbag draw together the flexible buffer device, and when the location, the rigidity contact of conventional location finding technique is avoided to manipulator hand and mechanical arm decoupling zero, avoids reaching the manipulator hand with the vibrations that mechanical arm located, does no