Lapping liquid central authorities supply system

The utility model relates to a manufacturing field of semiconductor, especially a lapping liquid central authorities supply system, a lapping liquid central authorities supply system, include and connect in order through the pipeline: former feed liquid feeding mechanism, lapping liquid mixing arrangement, lapping liquid feeding mechanism, a plurality of chemical mechanical polishing station, a discharge pipeline and the first loop connect former feed liquid feeding mechanism and lapping liquid mixing arrangement respectively, and lapping liquid mixing arrangement and lapping liquid feeding mechanism are connected respectively to the 2nd discharge pipeline and second return circuit, and the 3rd discharge pipeline is linked together and forms complete return circuit with the tertiary circuit. The beneficial effects of the utility model are that: the technical scheme of the utility model but make full use of has former supply system now, need not establish more large -scale central authorities along with the in