HOLDING SYSTEM FOR SINGLE CRYSTAL SILICON ROD IN SECTION SMELTING SINGLE CRYSTAL FURNACE

The utility model relates to a holding mechanism for pulling a single crystal silicon rod with major diameter in a zone smelting single crystal furnace, composed of a holding body, a holding ring, supporting pillars, three holding rods, etc. The holding body is arranged inside a vacuum furnace chamb...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHANG YINCHI, SHENG YAOCHANG
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!