HOLDING SYSTEM FOR SINGLE CRYSTAL SILICON ROD IN SECTION SMELTING SINGLE CRYSTAL FURNACE

The utility model relates to a holding mechanism for pulling a single crystal silicon rod with major diameter in a zone smelting single crystal furnace, composed of a holding body, a holding ring, supporting pillars, three holding rods, etc. The holding body is arranged inside a vacuum furnace chamb...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHANG YINCHI, SHENG YAOCHANG
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model relates to a holding mechanism for pulling a single crystal silicon rod with major diameter in a zone smelting single crystal furnace, composed of a holding body, a holding ring, supporting pillars, three holding rods, etc. The holding body is arranged inside a vacuum furnace chamber, and can be simultaneously rotated lifted up and down along with a lower shaft; the inner cavity of the holding body can be filled with recirculating cooling water; the holding ring is welded with a shifting fork and is provided with three supporting blocks, and the supporting pillars are arranged on the positions symmetric to the positions of the supporting blocks; three holding rods are aslant inserted into the holes of the holding body. When the holding ring is toggled to rotate, the supporting blocks are rotated along with the holding ring and are separated from the supporting pillars; the three holding rods are not blocked any longer, and glide downwards along inclined holes under the action of the gravities; the rod ends of the holding rods are simultaneously contacted with a single crystal silicon rod, to achieve the purpose of holding.