Unsteady vacuum mechanism

The utility model provides an unsteady vacuum mechanism, it includes vacuum cavity, jacking cavity, vacuum table, PMKD and piston axle, the jacking cavity passes through the elastic support componentand is connected with PMKD, vacuum table is connected with the one end of piston axle, the other end of piston axle passes the bottom of jacking cavity and is connected with PMKD, sealing connection between jacking cavity and the piston axle. Adopt the technical scheme of the utility model, the jacking cavity adopts flexible sealing connection with vacuum table, and the cavity warp does not influence vacuum table, when carrying out the evacuation, guarantees that vacuum table can not incline or rock like this, simplify the degree machining precision requirement of vacuum cavity plane, improvedthe processing degree of difficulty. 本实用新型提供了种浮动真空机构，其包括真空腔体、顶升腔体、真空平台、固定底板和活塞轴，所述顶升腔体通过弹性支撑构件与固定底板连接；所述真空平台与活塞轴的端连接，所述活塞轴的另端穿过顶升腔体的底部与固定底板连接；所述顶升腔体与活塞轴之间密封连接。采用本实用新型的技术方案，顶升腔体与真空平台采用柔性的密封连接，腔体变形不影响真空平台，这样在进行抽真空时，保证真空平台不会倾斜或晃