Brilliant boat and wafer bear device

The utility model provides a brilliant boat and wafer bear device, brilliant boat includes the support and sets up a plurality of supporting parts on the support, two adjacent supporting part shape crystallization circular slots, brilliant boat includes at least one wafer groove, and the wafer is pl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU FENG, LIU GUANGMIAO, LI XUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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