Brilliant boat and wafer bear device

The utility model provides a brilliant boat and wafer bear device, brilliant boat includes the support and sets up a plurality of supporting parts on the support, two adjacent supporting part shape crystallization circular slots, brilliant boat includes at least one wafer groove, and the wafer is pl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU FENG, LIU GUANGMIAO, LI XUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a brilliant boat and wafer bear device, brilliant boat includes the support and sets up a plurality of supporting parts on the support, two adjacent supporting part shape crystallization circular slots, brilliant boat includes at least one wafer groove, and the wafer is placed at the wafer inslot, there are two relative surfaces in the wafer groove, and one of them surface coating has full reflective material, and another surface is provided with light sensor, light sensor can emit light bundle, has born the wafer on the supporting part but during the not happening fragmentation, and the light beam is sheltered from by the wafer is whole, when wafer emergence fragmentation, the coating that smooth beam energy that light sensor sent shines the supporting part hasfull reflective material's a surface, because the surface coating of supporting part has full reflective material, and the light beam can be launched return to be received and judged the wafer by light sensor has taken place