Drum type magnetron sputtering system
The utility model relates to an is plasma technology and aim at the ion with the film of metal, semiconductor, dielectric and compound plasma deposition is to the solid surface. The technique effect:shorten the regulation time, improve and adjust the precision and simplify drum type magnetron sputte...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | SERGEI PAVLOVICH MARYSHEV VITALI VLADIMIROVICH MIHALKOVICH ALEKSANDR ALEKSEEVICH YASUNAS |
| description | The utility model relates to an is plasma technology and aim at the ion with the film of metal, semiconductor, dielectric and compound plasma deposition is to the solid surface. The technique effect:shorten the regulation time, improve and adjust the precision and simplify drum type magnetron sputtering system's design. Drum type magnetron sputtering system is including sputtering the unit, itsmagnetic system that has the stay tube and install the magnetic system on the stay tube. A detachable connecting part for inciting somebody to action the unit that the cavity was fastened in the magnetron sputtering system includes aotration clamping mechanism driving shaft and the fixed axle that has set screw, the guide portion of magnetic system is equipped with between fixed axle and the staytube the one end of fixed axle includes the tooth rifling and the detachable connecting part guide portion of magnetic system, between fixed axle and the stay tube uses the fluting clutch that has thefluting surface to form to t |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN206986278UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN206986278UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN206986278UU3</originalsourceid><addsrcrecordid>eNrjZFB1KSrNVSipLEhVyE1Mz0stKcrPUyguKC0pSS3KzEtXKK4sLknN5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpQK3xzn5GBmaWFmZG5hahocZEKQIAyjIonw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Drum type magnetron sputtering system</title><source>esp@cenet</source><creator>SERGEI PAVLOVICH MARYSHEV ; VITALI VLADIMIROVICH MIHALKOVICH ; ALEKSANDR ALEKSEEVICH YASUNAS</creator><creatorcontrib>SERGEI PAVLOVICH MARYSHEV ; VITALI VLADIMIROVICH MIHALKOVICH ; ALEKSANDR ALEKSEEVICH YASUNAS</creatorcontrib><description>The utility model relates to an is plasma technology and aim at the ion with the film of metal, semiconductor, dielectric and compound plasma deposition is to the solid surface. The technique effect:shorten the regulation time, improve and adjust the precision and simplify drum type magnetron sputtering system's design. Drum type magnetron sputtering system is including sputtering the unit, itsmagnetic system that has the stay tube and install the magnetic system on the stay tube. A detachable connecting part for inciting somebody to action the unit that the cavity was fastened in the magnetron sputtering system includes aotration clamping mechanism driving shaft and the fixed axle that has set screw, the guide portion of magnetic system is equipped with between fixed axle and the staytube the one end of fixed axle includes the tooth rifling and the detachable connecting part guide portion of magnetic system, between fixed axle and the stay tube uses the fluting clutch that has thefluting surface to form to t</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180209&DB=EPODOC&CC=CN&NR=206986278U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180209&DB=EPODOC&CC=CN&NR=206986278U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SERGEI PAVLOVICH MARYSHEV</creatorcontrib><creatorcontrib>VITALI VLADIMIROVICH MIHALKOVICH</creatorcontrib><creatorcontrib>ALEKSANDR ALEKSEEVICH YASUNAS</creatorcontrib><title>Drum type magnetron sputtering system</title><description>The utility model relates to an is plasma technology and aim at the ion with the film of metal, semiconductor, dielectric and compound plasma deposition is to the solid surface. The technique effect:shorten the regulation time, improve and adjust the precision and simplify drum type magnetron sputtering system's design. Drum type magnetron sputtering system is including sputtering the unit, itsmagnetic system that has the stay tube and install the magnetic system on the stay tube. A detachable connecting part for inciting somebody to action the unit that the cavity was fastened in the magnetron sputtering system includes aotration clamping mechanism driving shaft and the fixed axle that has set screw, the guide portion of magnetic system is equipped with between fixed axle and the staytube the one end of fixed axle includes the tooth rifling and the detachable connecting part guide portion of magnetic system, between fixed axle and the stay tube uses the fluting clutch that has thefluting surface to form to t</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFB1KSrNVSipLEhVyE1Mz0stKcrPUyguKC0pSS3KzEtXKK4sLknN5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpQK3xzn5GBmaWFmZG5hahocZEKQIAyjIonw</recordid><startdate>20180209</startdate><enddate>20180209</enddate><creator>SERGEI PAVLOVICH MARYSHEV</creator><creator>VITALI VLADIMIROVICH MIHALKOVICH</creator><creator>ALEKSANDR ALEKSEEVICH YASUNAS</creator><scope>EVB</scope></search><sort><creationdate>20180209</creationdate><title>Drum type magnetron sputtering system</title><author>SERGEI PAVLOVICH MARYSHEV ; VITALI VLADIMIROVICH MIHALKOVICH ; ALEKSANDR ALEKSEEVICH YASUNAS</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN206986278UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2018</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>SERGEI PAVLOVICH MARYSHEV</creatorcontrib><creatorcontrib>VITALI VLADIMIROVICH MIHALKOVICH</creatorcontrib><creatorcontrib>ALEKSANDR ALEKSEEVICH YASUNAS</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SERGEI PAVLOVICH MARYSHEV</au><au>VITALI VLADIMIROVICH MIHALKOVICH</au><au>ALEKSANDR ALEKSEEVICH YASUNAS</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Drum type magnetron sputtering system</title><date>2018-02-09</date><risdate>2018</risdate><abstract>The utility model relates to an is plasma technology and aim at the ion with the film of metal, semiconductor, dielectric and compound plasma deposition is to the solid surface. The technique effect:shorten the regulation time, improve and adjust the precision and simplify drum type magnetron sputtering system's design. Drum type magnetron sputtering system is including sputtering the unit, itsmagnetic system that has the stay tube and install the magnetic system on the stay tube. A detachable connecting part for inciting somebody to action the unit that the cavity was fastened in the magnetron sputtering system includes aotration clamping mechanism driving shaft and the fixed axle that has set screw, the guide portion of magnetic system is equipped with between fixed axle and the staytube the one end of fixed axle includes the tooth rifling and the detachable connecting part guide portion of magnetic system, between fixed axle and the stay tube uses the fluting clutch that has thefluting surface to form to t</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN206986278UU |
| source | esp@cenet |
| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Drum type magnetron sputtering system |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T18%3A46%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SERGEI%20PAVLOVICH%20MARYSHEV&rft.date=2018-02-09&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN206986278UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |