A complete sets for preparation of semiconductor polish

The utility model provides a complete sets for preparation of semiconductor polish belongs to the polishing technology field. This a complete sets for preparation of semiconductor polish smashes appearance and finished product collection box including agitator tank, ultrasonic wave, is fixed with ag...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG JUN, HU ZEHAO, YIN TAO, WANG PEIYOU, YIN ZHICHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a complete sets for preparation of semiconductor polish belongs to the polishing technology field. This a complete sets for preparation of semiconductor polish smashes appearance and finished product collection box including agitator tank, ultrasonic wave, is fixed with agitator motor on the agitator tank, and agitator motor is connected with the (mixing) shaft, and the(mixing) shaft is fixed with collar no. 1 and collar no. 2, and collar no. 1 is fixed with stirring subassembly no. 1, and collar no. 2 is fixed with stirring subassembly no. 2, agitator tank intercommunication has connecting pipe no. 1, and connecting pipe no. 1 is smashed the appearance with the ultrasonic wave and is linked together, is provided with liquid pump no. 1 on the connecting pipe no.1, and the ultrasonic wave is smashed the appearance and is linked together through connecting pipe no. 2 with finished product collection box, and the intercommunication is gone up to connecting pipe no. 2 has the circulatin