Be used for vacuum interconnection scanning electron microscope sample to hold in palm

The utility model relates to a vacuum machinery especially relates to a be used for vacuum interconnection scanning electron microscope sample to hold in palm for the loading and the fixed problem of scan electronic speculum wafer sample (wafer) under the solution vacuum interconnection. This sample holder has a three layer construction, and the top layer comprises sample holder dish connecting seat (6) the bottom of sample holder dish (5), sample pressure spring (3) that the equidistance distributes, corresponding radial push rod (2), radial push rod fixing base (4), central rotating cam (1), bearing (7) and preferred circular structure, the intermediate level is a spring prestressed layer, and the lower floor is that a sample holder with central rotating cam (1) center pin interference fit installs interface (9). Sample holder dish (5) of fixed top layer, rotatory bottom sample holder installation interface (9) can drive the loading that pushed open central rotating cam (1) or closed sample pressure spring