Surface dielectric barrier discharge plasma material processing apparatus

The utility model provides a surface dielectric barrier discharge plasma material processing apparatus, includes: the fixed integral type surface discharge electrode with the round hole in area, a silica gel pad for $sealing up and regulation plasma processing clearance, the fixed base with the roun...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG XIULING, DUAN DONGZHI, LI ZHUANG, DI LANBO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a surface dielectric barrier discharge plasma material processing apparatus, includes: the fixed integral type surface discharge electrode with the round hole in area, a silica gel pad for $sealing up and regulation plasma processing clearance, the fixed base with the round hole in area, it is fixed with screw and nut. The fixed integral type surface discharge electrode with the round hole in area includes: telluric electricity field, medium, high voltage electrode to and the spring of connection high voltage electrode and power, be used for silica gel pad sealed and that adjust the plasma processing clearance, middle hollow out construction for placing pending material, the edge has the fixed round hole of using, the base has inlet port and venthole, the screw passes the base in proper order, round hole on silica gel pad and the surface discharge electrode, then use tighten nut, reach sealed effect. 种表面介质阻挡放电等离子体材料处理装置,包括:带固定用圆孔的体式表面放电电极;用于密封和调节等离子体处理间隙的硅胶垫;带固定用圆孔的底座;固定用螺丝和螺母。所述带固定