A heating platform for plane target is bound
The utility model discloses a heating platform for plane target is bound, include through articulated upper chamber and lower chamber, be provided with silica gel die and electromagnetism bleed valve in the upper chamber, be provided with in the lower chamber and bind the warm table, bind and evenly...
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| creator | XIONG BIN SUN YAOMING ZHANG MING HUANG HUALIN XU HUABI HUANG CHUNMING LIU CHENGYAN MIAO LEI ZHOU JIANHUA WANG XIAOYANG |
| description | The utility model discloses a heating platform for plane target is bound, include through articulated upper chamber and lower chamber, be provided with silica gel die and electromagnetism bleed valve in the upper chamber, be provided with in the lower chamber and bind the warm table, bind and evenly laid a plurality of heating rod in the warm table, lower chamber is connected with electromagnetism admission valve and vacuum pump connecting port, and the vacuum pump passes through the pipe connection to the vacuum pump connecting port. The utility model discloses a vacuum laminating prevents indium surface oxidation influence laminating effect, effectually prevents droing of target, adopt the flexible silica gel board to utilize the pressure differential pressurization to be favorable to protecting target and difficult production laminating dislocation, it is even that the indium coating is convenient for in supersound vibrations, and the production that can avoid the bubble is bound in the vacuum.
本实用新型公开了种用于 |
| format | Patent |
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本实用新型公开了种用于</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | A heating platform for plane target is bound |
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