A heating platform for plane target is bound

The utility model discloses a heating platform for plane target is bound, include through articulated upper chamber and lower chamber, be provided with silica gel die and electromagnetism bleed valve in the upper chamber, be provided with in the lower chamber and bind the warm table, bind and evenly...

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Bibliographische Detailangaben
Hauptverfasser: XIONG BIN, SUN YAOMING, ZHANG MING, HUANG HUALIN, XU HUABI, HUANG CHUNMING, LIU CHENGYAN, MIAO LEI, ZHOU JIANHUA, WANG XIAOYANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a heating platform for plane target is bound, include through articulated upper chamber and lower chamber, be provided with silica gel die and electromagnetism bleed valve in the upper chamber, be provided with in the lower chamber and bind the warm table, bind and evenly laid a plurality of heating rod in the warm table, lower chamber is connected with electromagnetism admission valve and vacuum pump connecting port, and the vacuum pump passes through the pipe connection to the vacuum pump connecting port. The utility model discloses a vacuum laminating prevents indium surface oxidation influence laminating effect, effectually prevents droing of target, adopt the flexible silica gel board to utilize the pressure differential pressurization to be favorable to protecting target and difficult production laminating dislocation, it is even that the indium coating is convenient for in supersound vibrations, and the production that can avoid the bubble is bound in the vacuum. 本实用新型公开了种用于