Semi -conductor test structure

The utility model discloses a semi -conductor test structure, include: be located floating gate and first control bars on the basement, wherein the floating gate includes first portion and second portion, the first control bars are located on the first portion of floating gate, and expose the second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG JINSHUANG, ZOU LUJUN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a semi -conductor test structure, include: be located floating gate and first control bars on the basement, wherein the floating gate includes first portion and second portion, the first control bars are located on the first portion of floating gate, and expose the second portion of floating gate, first terminal with the second portion electricity of floating gate is connected, second terminal with first control bars electricity is connected. Like this, through electricity connection respectively first terminal and second terminal, and apply voltage on the first terminal, will does second terminal ground connection obtain the electric current voltage (I V, ) curve and calculate its resistance, according to the resistance resistance just can be judged the floating gate with whether there is the boundary layer between the first control bars to improve semi -conductor test structure's reliability. 本实用新型公开了种半导体测试结构,包括:位于基底之上的浮栅和第控制栅,其中所述浮栅包括第部分以及第二部分,所述第控制栅位于所述浮栅的第部分之上,并且露出所述浮栅的第二部分;第终