Four electrode support seat subassemblies of high power high current ion source

The utility model belongs to the technical field of a high power ion source, concretely relates to four electrode support seat subassemblies of high power high current ion source, this subassembly includes mainly that four jumbo size electrode method are blue, the three electrode support who has several slit structures, three PEEK insulation cavity. Have an insulation cavity between per two flanges, the flange passes through O type fluoro -rubber sealing ring and constitutes both ends open -ended vacuum seal insulation cavity with the insulation cavity cooperation. After this electrode grid supporting seat subassembly had adopted and has passed through the sealed equipment of sealing washer with blue, the insulation cavity of four layers electrode method and support frame, the method of carrying out depth of parallelism correction once more to the four layers holding surface can make every layer of depth of parallelism between the electrode support face reach within the 0.04mm, has effectively reduced a plura