Unattended system is used in vacuum apparatus cooling

The utility model discloses an unattended system is used in vacuum apparatus cooling, including the vacuum apparatus, the refrigeration water route, water route and electrical control device from the beginning, the refrigeration water route includes water tower and the refrigerator that meets with t...

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Bibliographische Detailangaben
Hauptverfasser: HE FEI, LU WEI, WEN QIFAN, QIAO JIANGJIANG, CHANG CHENYANG, ZHANG YONG, YE YUANSHENG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses an unattended system is used in vacuum apparatus cooling, including the vacuum apparatus, the refrigeration water route, water route and electrical control device from the beginning, the refrigeration water route includes water tower and the refrigerator that meets with the water tower, refrigeration water inlet channel and refrigeration water return water pipe have been met between water tower and the vacuum apparatus, install the suction pump and intake normally -closed solenoid valves on the refrigeration water inlet channel, install return water normally -closed solenoid valves on the refrigeration water return water pipe, the water route includes running water inlet channel and running water return water pipe from the beginning, install into water normally open solenoid valve on the running water inlet channel, install the return water normally open solenoid valve on the running water return water pipe. The utility model has the advantages of simple structure and reasonable de