Polishing clamp of wafer

The utility model provides a polishing clamp of wafer, including A disc -shaped's disk body, its characterized in that, disk body border department has tooth of a plurality of equipartitions, the disk body center has the locating hole, the polishing hole who runs through and be used for placing the wafer still has on the disk body, polishing hole's quantity is two at least, still has the correction hole that runs through on the disk body between the two adjacent polishing hole. This polishing clamp of wafer is owing to install rather than the small -size wafer of assorted at the positioning hole, consequently, can guarantee to be stretched out by the polishing operations wafer height of disk body, and consequently, its polishing quality can obtain the assurance. 本实用新型提供了种晶圆片的抛光夹具，包括呈圆盘状的盘体，其特征在于，所述盘体边沿处具有若干均布的齿牙，所述盘体中心具有定位孔，所述盘体上还具有贯穿的且用于放置晶圆片的抛光孔，所述抛光孔的数量至少为两个，相邻两抛光孔之间的盘体上还具有贯穿的校正孔。本晶圆片的抛光夹具由于在定位孔处安装有与其相匹配的小型晶圆片，因此，能保证被抛光作业晶圆片伸出盘体的高度，因此，其抛光质量能得到保证。