Base plate rotary device

The utility model relates to a base plate rotary device, its base plate to circular disk form goes on making the base plate rotate when supporting, and it includes: substrate supporting part, it sets up as and supports edge one side of base plate, inclined support surface portion, it sets up to right the another side of base plate supports along one side to set up for use one end as the benchmark can for the substrate supporting part slope to can with relatively substrate supporting part the corresponding form of base plate configuration angle is right the inclination (tilting angle) of inclined support surface portion adjusts to can stably keep supported condition ( clamping state ), and rotatory condition that can accurate control substrate. 本实用新型涉及种基板旋转装置，其对圆形盘形状的基板进行支撑的同时使得基板进行旋转，其包括：基板支撑部，其设置为对基板的边缘侧进行支撑；倾斜支撑部，其设置为对所述基板的另边缘侧进行支撑，并设置为以端为基准能够相对于所述基板支撑部倾斜，并且能够以与相对所述基板支撑部的所述基板配置角度相对应的形式，对所述倾斜支撑部的倾斜角度(tilting angle)进行调节，从而能够稳定保持支撑状态(夹持状态)，并能够准确控制基板的旋转条件。