ITO electrode 3d graph case detects optic system

The utility model discloses a ITO electrode 3d graph case detects optic system, wait to examine the ITO film including digital holographic light path and one, set up a laser instrument in the digital holographic light path, be equipped with a beam splitting Prism on the laser emitting laser beam face, be provided with spatial filter between beam splitting Prism and laser instrument, beam splitting Prism half transmitting orientation and half reflection direction respectively are equipped with a reference plain noodles planar mirror and a thing light planar mirror, being equipped with on the reflected light path of thing light plane speculum and waiting to examine the ITO film, reference plain noodles planar mirror's folded light beam is equipped with with the folded light beam department of assembling of thing light plane speculum and assembles beam splitting Prism, and the light beam assembles through assembling beam splitting Prism, and take place on CCDCMOS image sensor surface to interfere, CCDCMOS image