Continuous type vacuum coating equipment

The utility model relates to a continuous type vacuum coating equipment, include: real empty room device includes the vacuum chamber and is used for maintaining the evacuation mechanism that the vacuum chamber is in predetermined vacuum state that the vacuum chamber includes the coating film room at...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG YONGSHENG, CUI HANFU, XU MINSHENG, GONG WENZHI, MAN XIAOHUA, ZHUANG BINGHE, WANG YINGBIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model relates to a continuous type vacuum coating equipment, include: real empty room device includes the vacuum chamber and is used for maintaining the evacuation mechanism that the vacuum chamber is in predetermined vacuum state that the vacuum chamber includes the coating film room at least, the coating film device constructs and inductive coupling mechanism in the indoor coating machine of coating film including setting up, conveyer for continuous cyclic transfer work piece, conveyer includes the conveyor belt mechanism of closed loop design and is carried out cyclic transfer's the support plate that is used for loading the work piece by conveyor belt mechanism, conveyor belt mechanism includes the vacuum transfer section who is located the vacuum chamber and is located the outside atmosphere transfer section who just corresponds the linking with vacuum transfer section of vacuum chamber, and controlling means, be used for control evacuation mechanism, coating film device and conveyor belt mec