Novel graphite alkene high -temperature pressure sensor of no cavity

The utility model relates to a high -temperature pressure tests the graphite alkene sensor of nai high -temperature pressure of technical field, a concretely relates to novel no cavity. The high -temperature pressure sensor is no chamber arrangement, the high -temperature pressure sensor is includin...

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Bibliographische Detailangaben
Hauptverfasser: LI MENGWEI, WU CHENGGEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model relates to a high -temperature pressure tests the graphite alkene sensor of nai high -temperature pressure of technical field, a concretely relates to novel no cavity. The high -temperature pressure sensor is no chamber arrangement, the high -temperature pressure sensor is including boron nitride / graphite alkene / the boron nitride heterojunction that is used for experiencing the external pressure, the outside of boron nitride / graphite alkene / boron nitride heterojunction does not set up chamber arrangement, boron nitride / graphite alkene / boron nitride heterojunction is three layer construction, and from the top down is top layer boron nitride, graphite alkene layer and bottom boron nitride in proper order. The high -temperature pressure sensor utilizes boron nitride / graphite alkene / boron nitride heterojunction to experience outside pressure signal as sensing element, and device sensitivity does not rely on the pressure chamber, so can not produce the temperature drift that extra