Substrate cassette

The utility model provides a substrate cassette, comprises a frame, form accommodation space in the frame, be provided with the load bearing structure that the multilayer is used for bearing substrate in this accommodation space, the last bearing area on schedule that is provided with of load bearing structure, substrate cassette is still including setting up response device on the frame, the response device is used for responding to its corresponding inductive position and whether has the base plate to produce corresponding sensing signal according to the response result, inductive position is located predetermined bearing area is outside. The utility model provides a substrate cassette can reduce the damage that the base plate appears with the collision of frame to the base plate of discovery damage in time. 本实用新型提供种基板卡匣，包括框架，所述框架内形成容纳空间，该容纳空间内设置有多层用于承载基板的承载结构，所述承载结构上设置有预定承载区域，所述基板卡匣还包括设置在所述框架上的感应器件，所述感应器件用于感应其相应的感应位置是否存在基板，并根据感应结果产生相应的感应信号；所述感应位置位于所述预定承载区域外部。本实用新型提供的基板卡匣能够减少基板与框架的碰撞而出现的破损，并及时发现破损的基板。