Silicon chip conveyer

The application discloses silicon chip conveyer includes: with the waterproof hard shell of silicon chip shape assorted, waterproof hard shell includes detachable sealing connection's base and top cap, two relative sides set up the same being used for of tangible form respectively and block in waterproof hard shell's the inner chamber the first draw -in groove part and the second draw -in groove part of silicon chip, fill in the inner chamber have right the silicon chip forms the liquid of buffering. The application provides an above -mentioned silicon chip conveyer can avoid the transportation because of the surperficial damage of silicon chip that rubs and cause of each other to because of rocking the breakage that causes in the reduction silicon chip transportation, prevent simultaneously that the silicon chip from polluting. 本申请公开了种硅片运输装置，包括：与硅片形状相匹配的防水硬质外壳，所述防水硬质外壳包括可拆卸式密封连接的底座和顶盖；所述防水硬质外壳的内腔中相对的两个侧面分别设置有形状相同的用于卡住所述硅片的第卡槽部件和第二卡槽部件；所述内腔中填充有对所述硅片形成缓冲的液体。本申请提供的上述硅片运输装置，能够避免运输过程因互相摩擦造成的硅片表面的损伤，并降低硅片运输过程中因晃动造