A aging device for semiconductor gas sensor
The utility model relates to an aging device for semiconductor gas sensor, include air feeder and the damping tube that is used for the control of gases flow, damping tube one end be the air inlet, the air inlet is connected with air feeder, the other end is for being used for connecting the gas out...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to an aging device for semiconductor gas sensor, include air feeder and the damping tube that is used for the control of gases flow, damping tube one end be the air inlet, the air inlet is connected with air feeder, the other end is for being used for connecting the gas outlet that will carry out the semiconductor gas sensor of ageing treatment, through adjusting damping tube control of gases flow, and compare traditionally by control pressure controller, the gas flow controlling means that surge damping valve and electron pressure table are constituteed, used damping tube simple structure, and the cost is low, high durability and convenient use, the gas flow controlgear structure is complicated in having solved semiconductor gas sensor aging device, the problem that the cost is high.
本实用新型涉及种用于半导体气敏传感器的老化装置,包括供气装置和用于控制气体流量的阻尼管,所述的阻尼管端为进气口,进气口与供气装置连接,另端为用于连接要进行老化处理的半导体气敏传感器的出气口,通过调节阻尼管控制气体流量,而相比传统的由控制压力控制器、稳压阀和电子压力表组成的气体流量控制装置,所用的阻尼管结构简单、造价低,使用方便,解决了半导体气敏传感器老化装置中气体流量控制设备结构复杂、造价高的问题。 |
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