Compound absolute displacement measuring device that interferes based on michelson interferometer principle
The utility model discloses a compound absolute displacement measuring device that interferes based on michelson interferometer principle belongs to optical measurements technical field. The system comprises low relevant bare source, high coherent light light source, first level crossing, second lev...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a compound absolute displacement measuring device that interferes based on michelson interferometer principle belongs to optical measurements technical field. The system comprises low relevant bare source, high coherent light light source, first level crossing, second level crossing, third level crossing, branch slide, compensation plate, receiver, extra compensation plate. Adopt one set of interference device, lead to simultaneously with the three routes light path, the calibration effect of low relevant bare way during as absolute counting, first high coherent light light path plays the function of precision measurement displacement, and the optical distance change volume that the high coherent light light path measuring ring border factor of second results in is with elimination measuring error. The utility model discloses a simple structure, convenient to use can effectively eliminate mechanical transmission's the bidirectional transmission error or the nonlinearity and the tem |
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