Free -form surface optical element appearance measurement system based on automatic tracking

The utility model discloses a free -form surface optical element appearance measurement system based on automatic tracking, including movement module, position servo module and dual -frenquency laser interferometer, movement module includes revolving stage, guide rail, voice coil motor, slider and frame, the position servo module includes colored confocal displacement sensor, signal conditioning ware, automatic following control ware, voice coil motor driver, grating chi and grating chi reading head, dual -frenquency laser interferometer includes laser instrument, plane interference mirror group and portable reflector, the utility model discloses a probe automatic tracking's measurement mode comes the match and is surveyed optical element's appearance, the effectively motionless great problem of bringing of unable measurement PV value of probe among the current methods of measurement of solution. Adopt colored confocal measuring principle simultaneously, enable measurement accuracy and resolution ratio and al