Can control electric field strength's sputtering coating device

The utility model discloses a can control electric field strength's sputtering coating device, including supporting legs, heat dissipation fan and timing device, the top of supporting legs is equipped with the coating film control cabinet, heat dissipation fan embedding is installed in the left...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Yan Dulun, Tang Guimin, Wang Kebin
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a can control electric field strength's sputtering coating device, including supporting legs, heat dissipation fan and timing device, the top of supporting legs is equipped with the coating film control cabinet, heat dissipation fan embedding is installed in the left side of coating film control cabinet, and the right side of heat dissipation fan is equipped with mixed gas tank, the top of mixing gas tank is equipped with the vacuum pump, be equipped with the gas?control valve on the coating film control cabinet, the upper right side of gas?control valve is equipped with the magnetic field display list, the top of coating film control cabinet is equipped with microcomputer processing apparatus, microcomputer processing apparatus's left side is equipped with the vacuum coating cavity, the bottom of coating machine body lid is equipped with the coating film target. The utility model relates to a can control electric field strength's sputtering coating device utilizes the microcompute