Silica -based grating coupler

The utility model discloses a silica -based grating coupler, the coupler includes a insulator silicon and an optic fibre, and the top at the insulator silicon is placed perpendicularly to optic fibre, the insulator silicon is by a silicon layer, bury the insulator layer, the silicon substrate is constituteed, top silicon layer surface preparation has one section silicon fiber waveguide, the silicon fiber waveguide includes consecutive first laminating section, slope section and second laminating section, the laminating of first laminating section is fixed on burying the insulator layer, begin from the first laminating section and the crossing position of section that inclines, the insulator layer of burying of top silicon layer below is undercuted by the corruption, so the laminating of second laminating section is fixed on the silicon substrate, the slope section goes up the preparation has the coupling grating, the top at the coupling grating is placed to optic fibre. The grating coupler and the external fi